Patent number 6,359,370 - “Piezoelectric Multiple Degree of Freedom Actuator” discloses a new ultra-high precision placement system for mechanical positioning, operation, and control in the nanometer range. Applications of such ultra-high precision systems include semiconductor manufacturing, nanotechnology, optoelectronics, and biomedical systems. Dr. Chang has had extensive experience developing new piezoelectric positioners, magnetic transmissions, and high precision robotics. The current nano-actuator is a low cost multiple degree-of-freedom (DOF) piezoelectric positioner which has a resolution of 2 nanometer per linear axis and a 1 arc-second angular resolution with response time of 1.5 microns per millisecond, and minimum range of 15 microns by 15 microns. The angular coupling between x and y axes is less than 1 degree. Having SIX degrees-of-freedom (x - y - z - φ - θ - ψ) enables the nano-actuator to cancel out multi-directional vibrations.
Motion of the nano-actuator in the x-direction