MEMS Fabry-Perot Fiber Optic Microphone

Description:

https://www.google.com/patents/US7561277

Patent Information:
Category(s):
Censors/Semiconductors
For Information, Contact:
Simon Nynens
VP, Business Incubation
New Jersey Institute of Technology
simon.nynens@njit.edu
Inventors:
Ken Chin
Guan-Hua Feng
Harry Roman
Yan Sun
Keywords:
Patent Issued
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