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Micro-Mirror & Actuator with Extended Travel Range - 6,480,646
https://www.google.com/patents/US6480646
Published: 12/7/2018
|
Inventor(s):
Kenneth (Beau) Farmer
,
Richard Brown
,
Xing Wu
Keywords(s):
Patent Issued
Category(s):
Transdisciplinary Areas > Censors/Semiconductors
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